Research Projects
Direct Laser Writing Lithography and Metrology
Apr 2023 - Present
Investigation of single and multi-photon lithography on nanopositioning machines. Design and characterization of direct laser writing systems, including optical, mechanical, and electronic implementation. Development of metrology solutions for lithography alignment and configurable fabrication.
Data Preparation and Simulation for Lithography
Oct 2021 - Mar 2023
Proximity correction and optimization of layout data to minimize design-manufacturing deviation. Process simulation and prediction. Advanced metrology including roughness evaluation, overlay measurement, and automated SEM inspection.
Investigation of Direct Writing Methods for Large Area Gratings
Aug 2020 - Sep 2021
Master thesis project focusing on exposure recipe design, batch command programming, and comprehensive characterization using multiple measurement techniques. Optimization of lithography system performance including resolution, homogeneity, and stability.
System Design for Direct Writing Interference Lithography
Nov 2019 - Jul 2020
Optical design including diffractive gratings, mechanical assembly, and electronic control with LabVIEW. Collaboration with partners for system integration and clean room processing.